This course is an introduction to MEMS (Micro-Electro-Mechanical Systems) specifically adapted to Embedded System designers. By their ability to reduce size,

cost and power consumption of sensors and actuators, MEMS are used in a large variety of embedded systems mainly for sensing applications. It is then a required knowledge for an Embedded System designer to know available devices, how they work and the physical principles behind those small and efficient devices and trade-offs between power consumption, size and cost.

Topics include:

• MEMS overview including history, technology, market and applications
• Motion sensors: Proof-mass accelerometers with capacitive transduction, Proof-mass accelerometers with resistive transduction, Convective accelerometers, Lorentz force magnetic sensors, Gyroscopes and Combo sensors
• Pressure sensors: TPMS, Microphones
• Electrostatic actuators: RF capacitive switch
• Thermal actuators: Principle of lateral and vertical thermal actuators
• Energy harvesting