MEMs in Embedded Systems
Professor | Nouet Pascal |
Course program | MSc |
Year | 2 |
Semester | Fall |
Category | Fundamental |
ECTS | 2 |
Academic year | 2014/2015 |
This course is an introduction to MEMS (Micro-Electro-Mechanical Systems) specifically adapted to Embedded System designers. By their ability to reduce size,
cost and power consumption of sensors and actuators, MEMS are used in a large variety of embedded systems mainly for sensing applications. It is then a required knowledge for an Embedded System designer to know available devices, how they work and the physical principles behind those small and efficient devices and trade-offs between power consumption, size and cost.
Topics include:
- MEMS overview including history, technology, market and applications
- Motion sensors: Proof-mass accelerometers with capacitive transduction, Proof-mass accelerometers with resistive transduction, Convective accelerometers, Lorentz force magnetic sensors, Gyroscopes and Combo sensors
- Pressure sensors: TPMS, Microphones
- Electrostatic actuators: RF capacitive switch
- Thermal actuators: Principle of lateral and vertical thermal actuators
- Energy harvesting