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Education and Innovation in Embedded Systems Design

USI Università della Svizzera italiana, USI Faculty of Informatics, Advanced Learning and Research Institute USI Università della Svizzera italiana USI Faculty of Informatics USI Advanced Learning and Research Institute

MEMs in Embedded Systems

Professor Nouet Pascal
Course program MSc
Year 2
Semester Fall
Category Fundamental
Academic year 2014/2015

This course is an introduction to MEMS (Micro-Electro-Mechanical Systems) specifically adapted to Embedded System designers. By their ability to reduce size,

cost and power consumption of sensors and actuators, MEMS are used in a large variety of embedded systems mainly for sensing applications. It is then a required knowledge for an Embedded System designer to know available devices, how they work and the physical principles behind those small and efficient devices and trade-offs between power consumption, size and cost.

Topics include:

  • MEMS overview including history, technology, market and applications
  • Motion sensors: Proof-mass accelerometers with capacitive transduction, Proof-mass accelerometers with resistive transduction, Convective accelerometers, Lorentz force magnetic sensors, Gyroscopes and Combo sensors
  • Pressure sensors: TPMS, Microphones
  • Electrostatic actuators: RF capacitive switch
  • Thermal actuators: Principle of lateral and vertical thermal actuators
  • Energy harvesting