Chapter 1. MEMS overview

Abstract

This chapter starts with a practical example of an embedded system with sensing capabilities, the Wireless Sensor Node. Based on a practical study on an industrial product, the problem of power consumption is studied. After this introduction, history of MEMS is presented and several technical and scientific milestones are presented. Fabrication technologies are then described with a particular emphasis on Microelectronics technology and on specific add-ons for MEMS fabrication. Finally, a review of markets and applications is presented with a special focus on current trends.

• Introduction to MEMS: What are MEMS? MEMS in Wireless Sensor Networks
• History of MEMS
• Overview of Microelectronics technology
• Overview of Microsystems add-ons
• Market and applications

Chapter 2. MEMS Sensors and Actuators

Abstract

This chapter gives a detailed presentation of main MEMS devices.  Particular emphasis is given to motion and pressure sensors that are the main current markets. For each sensor, physical principles are given and an overview of products and academic demonstrators is presented.

• Motion Sensors: Proof-mass accelerometers with capacitive transduction, Proof-mass accelerometers with resistive transduction, Convective accelerometers, Lorentz force magnetic sensors, Gyroscopes and Combo sensors
• Pressure Sensors: TPMS, Microphones
• Electrostatic actuators: RF capacitive switch
• Thermal actuators: Principle of lateral and vertical thermal actuators
• Energy Harvesting